Inventor · disambiguated record
Sri Thirunavukarasu
Also filed as: THIRUNAVUKARASU SRI
1 granted patent·1 pending application·0 citations·filing 2019–2023
13Inventor score
Technology areasH10P
Files withAPPLIED MATERIALS INC2
Top patents by PatentIndex Score
2 records- 0163US2023187215A1Electrostatic chuck with reduced current leakage for hybrid laser scribing and plasma etch wafer singulation processAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 0256US11600492B2Electrostatic chuck with reduced current leakage for hybrid laser scribing and plasma etch wafer singulation processAPPLIED MATERIALS INC·Filed 2019·Granted Mar 7, 2023·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →