Inventor · disambiguated record
Steven E. Babayan
Also filed as: BABAYAN STEVEN · BABAYAN STEVEN E · BABAYAN STEVEN EDUARD
28 granted patents·15 pending applications·240 citations·filing 2000–2024
95Inventor score
Top patents by PatentIndex Score
43 records- 0197US7329608B2Method of processing a substrateUNIV CALIFORNIA·Filed 2004·Granted Feb 12, 2008·183 cites·32 claims
- 0295US12334385B2Tunable temperature controlled substrate support assemblyAPPLIED MATERIALS INC·Filed 2024·Granted Jun 17, 2025·1 cites·10 claims
- 0395US11114286B2In-situ optical chamber surface and process sensorAPPLIED MATERIALS INC·Filed 2019·Granted Sep 7, 2021·14 cites·20 claims
- 0493US11393710B2Wafer edge ring lifting solutionAPPLIED MATERIALS INC·Filed 2017·Granted Jul 19, 2022·9 cites·15 claims
- 0592US11373893B2Cryogenic electrostatic chuckAPPLIED MATERIALS INC·Filed 2020·Granted Jun 28, 2022·3 cites·20 claims
- 0692US10964584B2Process kit ring adaptorAPPLIED MATERIALS INC·Filed 2019·Granted Mar 30, 2021·7 cites·20 claims
- 0792US10607817B2Thermal repeatability and in-situ showerhead temperature monitoringAPPLIED MATERIALS INC·Filed 2017·Granted Mar 31, 2020·7 cites·20 claims
- 0891US12094752B2Wafer edge ring lifting solutionAPPLIED MATERIALS INC·Filed 2022·Granted Sep 17, 2024·1 cites·10 claims
- 0991US11569114B2Semiconductor processing with cooled electrostatic chuckAPPLIED MATERIALS INC·Filed 2021·Granted Jan 31, 2023·2 cites·20 claims
- 1089US11508558B2Thermal repeatability and in-situ showerhead temperature monitoringAPPLIED MATERIALS INC·Filed 2020·Granted Nov 22, 2022·2 cites·18 claims
- 1188US10440777B2Azimuthally tunable multi-zone electrostatic chuckAPPLIED MATERIALS INC·Filed 2016·Granted Oct 8, 2019·6 cites·20 claims
- 1281US9472435B2Tunable temperature controlled substrate support assemblyAPPLIED MATERIALS INC·Filed 2015·Granted Oct 18, 2016·2 cites·18 claims
- 1379US11075105B2In-situ apparatus for semiconductor process moduleAPPLIED MATERIALS INC·Filed 2018·Granted Jul 27, 2021·2 cites·16 claims
- 1476US2025087524A1Process kit enclosure systemAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1576US2024429088A1Wafer edge ring lifting solutionAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1673US11735401B2In-situ optical chamber surface and process sensorAPPLIED MATERIALS INC·Filed 2021·Granted Aug 22, 2023·0 cites·14 claims
- 1770US12009244B2Tunable temperature controlled substrate support assemblyAPPLIED MATERIALS INC·Filed 2020·Granted Jun 11, 2024·0 cites·15 claims
- 1869US10410900B2Precision screen printing with sub-micron uniformity of metallization materials on green sheet ceramicAPPLIED MATERIALS INC·Filed 2017·Granted Sep 10, 2019·1 cites·7 claims
- 1967US12504726B2Determining equipment constant updates by machine learningAPPLIED MATERIALS INC·Filed 2022·Granted Dec 23, 2025·0 cites·20 claims
- 2067US12406865B2Substrate carrier with array of independently controllable heater elementsAPPLIED MATERIALS INC·Filed 2021·Granted Sep 2, 2025·0 cites·6 claims
- 2166US11842917B2Process kit ring adaptorAPPLIED MATERIALS INC·Filed 2021·Granted Dec 12, 2023·0 cites·20 claims
- 2265US2019391602A1Methods and apparatus for enhanced flow detection repeatability of thermal-based mass flow controllers (mfcs)APPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 2364US12498705B2Chamber matching by equipment constant updatesAPPLIED MATERIALS INC·Filed 2022·Granted Dec 16, 2025·0 cites·20 claims
- 2464US11887879B2In-situ apparatus for semiconductor process moduleAPPLIED MATERIALS INC·Filed 2021·Granted Jan 30, 2024·0 cites·20 claims
- 2564US2025224721A1Causality-based fleet matchingAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2660US10409295B2Methods and apparatus for enhanced flow detection repeatability of thermal-based mass flow controllers (MFCS)APPLIED MATERIALS INC·Filed 2016·Granted Sep 10, 2019·0 cites·17 claims
- 2758US11721569B2Method and apparatus for determining a position of a ring within a process kitAPPLIED MATERIALS INC·Filed 2021·Granted Aug 8, 2023·0 cites·20 claims
- 2858US10535544B2Tunable temperature controlled substrate support assemblyAPPLIED MATERIALS INC·Filed 2016·Granted Jan 14, 2020·0 cites·11 claims
- 2957US2025225410A1Causality-based fleet matchingAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 3056US12165905B2Process kit enclosure systemAPPLIED MATERIALS INC·Filed 2019·Granted Dec 10, 2024·0 cites·20 claims
- 3156US11622419B2Azimuthally tunable multi-zone electrostatic chuckAPPLIED MATERIALS INC·Filed 2019·Granted Apr 4, 2023·0 cites·17 claims
- 3255US12211734B2Lift pin mechanismAPPLIED MATERIALS INC·Filed 2022·Granted Jan 28, 2025·0 cites·20 claims
- 3352US2019273008A1Precision screen printing with sub-micron uniformity of metallization materials on green sheet ceramicAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 3448US2018053666A1Substrate carrier with array of independently controllable heater elementsAPPLIED MATERIALS INC·Filed 2016·Application pending·0 cites
- 3547US11437261B2Cryogenic electrostatic chuckAPPLIED MATERIALS INC·Filed 2018·Granted Sep 6, 2022·0 cites·20 claims
- 3646US2024069537A1Substrate placement optimization using substrate measurementsAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 3746US2021287881A1Methods and apparatus for tuning semiconductor processesAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 3846US2018061616A1Low pressure lift pin cavity hardwareAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 3940US2020152425A1Substrate processing chamber component assembly with plasma resistant sealAPPLIED MATERIALS INC·Filed 2018·Application pending·0 cites
- 4038US2018122655A1Endpoint gas line filter for substrate processing equipmentAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 4136US2018061618A1Plasma screen for plasma processing chamberAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 4236US2018019104A1Substrate processing chamber component assembly with plasma resistant sealAPPLIED MATERIALS INC·Filed 2016·Application pending·0 cites
- 4335US2002129902A1Low-temperature compatible wide-pressure-range plasma flow deviceFiled 2000·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →