Inventor · disambiguated record
Stephen Edward
Also filed as: EDWARD STEPHEN
2 granted patents·5 pending applications·6 citations·filing 2018–2024
51Inventor score
Technology areasG03F
Files withASML NETHERLANDS BV7
Top patents by PatentIndex Score
7 records- 0187US10788765B2Method and apparatus for measuring a structure on a substrateASML NETHERLANDS BV·Filed 2018·Granted Sep 29, 2020·4 cites·20 claims
- 0279US11042096B2Alignment measurement systemASML NETHERLANDS BV·Filed 2018·Granted Jun 22, 2021·2 cites·21 claims
- 0360US2024184222A1Metrology method and apparatusASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 0458US2025189904A1Method for correcting measurements in the manufacture of integrated circuits and associated apparatusesASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0553US2025321501A1A radiation sourceASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0652US2025341790A1A membrane and associated method and apparatusASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0750US2024168392A1Assembly for separating radiation in the far fieldASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Stephen Edward files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →