Inventor · disambiguated record
Steve Egbert
Also filed as: EGBERT STEVE
3 granted patents·877 citations·filing 1996–1996
81Inventor score
Technology areasH10P
Files withGASONICS INTERNATIONAL3
Top patents by PatentIndex Score
3 records- 0196US5667592AProcess chamber sleeve with ring seals for isolating individual process modules in a common clusterGASONICS INTERNATIONAL·Filed 1996·Granted Sep 16, 1997·638 cites·8 claims
- 0289US5863170AModular process systemGASONICS INTERNATIONAL·Filed 1996·Granted Jan 26, 1999·129 cites·7 claims
- 0387US5855465ASemiconductor wafer processing carouselGASONICS INTERNATIONAL·Filed 1996·Granted Jan 5, 1999·110 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →