Inventor · disambiguated record

Stephanus Fengler

Also filed as: FENGLER STEPHANUS

0 granted patents·2 pending applications·0 citations·filing 2022–2025

Technology areasG03F

Files withZEISS CARL SMT GMBH2

Top patents by PatentIndex Score

2 records

0175US2025278025A1Euv optics module for an euv projection exposure apparatusZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
0253US2022373899A1Projection exposure apparatus with a thermal manipulatorZEISS CARL SMT GMBH·Filed 2022·Application pending·0 cites

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →