Inventor · disambiguated record
Steven Grzeskowiak
Also filed as: GRZESKOWIAK STEVEN
2 granted patents·6 pending applications·0 citations·filing 2021–2024
22Inventor score
Files withTOKYO ELECTRON LTD8
Top patents by PatentIndex Score
8 records- 0160US2025298307A1Method for patterning mask layer using metal-containing resistTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0257US2025306463A1Patterning a substrate using a multi-patterning techniqueTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0355US12451354B2Double patterning method of patterning a substrateTOKYO ELECTRON LTD·Filed 2022·Granted Oct 21, 2025·0 cites·16 claims
- 0453US2025138429A1Endpoint detection in dry development of photoresistTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0551US12451353B2Double hardmasks for self-aligned multi-patterning processesTOKYO ELECTRON LTD·Filed 2022·Granted Oct 21, 2025·0 cites·20 claims
- 0648US2023152705A1UV Treatment of EUV ResistsTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 0748US2023078946A1Hybrid Development of EUV ResistsTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0842US2024063019A1Patterning a Semiconductor SubstrateTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →