Inventor · disambiguated record
Stefan Lippoldt
Also filed as: LIPPOLDT STEFAN
2 granted patents·2 pending applications·0 citations·filing 2023–2025
23Inventor score
Files withZEISS CARL SMT GMBH4
Top patents by PatentIndex Score
4 records- 0165US2025199422A1Individual mirror of a pupil facet mirror and pupil facet mirror for an illumination optical unit of a projection exposure apparatusZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0262US12353137B2Field facet system and lithography apparatusZEISS CARL SMT GMBH·Filed 2023·Granted Jul 8, 2025·0 cites·20 claims
- 0359US2025208521A1Arrangement, method and computer program product for calibrating facet mirrorsZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0451US12372883B2Field facet for a field facet mirror of a projection exposure systemZEISS CARL SMT GMBH·Filed 2023·Granted Jul 29, 2025·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →