Inventor · disambiguated record
Steven E. Parks
Also filed as: PARKS STEVEN · PARKS STEVEN E
6 granted patents·1 pending application·152 citations·filing 1999–2014
82Inventor score
Top patents by PatentIndex Score
7 records- 0191US6301434B1Apparatus and method for CVD and thermal processing of semiconductor substratesMATTSON TECH INC·Filed 1999·Granted Oct 9, 2001·133 cites·22 claims
- 0280US10049858B2System and method for protection of vacuum seals in plasma processing systemsMATTSON TECH INC·Filed 2014·Granted Aug 14, 2018·5 cites·17 claims
- 0371US7817272B2High-resolution spectrally adjustable filterAEGIS LIGHTWAVE INC·Filed 2008·Granted Oct 19, 2010·6 cites·19 claims
- 0465US7864423B2Spectrally adjustable filterAEGIS LIGHTWAVE INC·Filed 2007·Granted Jan 4, 2011·4 cites·24 claims
- 0549US8284489B2Spectrally adjustable filterKOEPPEN CHRISTOPHER S·Filed 2007·Granted Oct 9, 2012·1 cites·29 claims
- 0645US6666588B1Collimator array having precisely aligned optical beams and method of assembling samePHOTURIS INC·Filed 2002·Granted Dec 23, 2003·3 cites·17 claims
- 0744US2012320376A1Spectrally adjustable filterKOEPPEN CHRISTOPHER S·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →