Inventor · disambiguated record
Stewart Robertson
Also filed as: ROBERTSON STEWART · ROBERTSON STEWART A
5 granted patents·1 pending application·27 citations·filing 1994–2017
77Inventor score
Files withGALLAGHER MICHAEL K1GRAVES JOHN S1KLA TENCOR CORP1ROBERTSON STEWART1ROHM & HAAS ELECT MAT1
Top patents by PatentIndex Score
6 records- 0186US7781141B2Compositions and processes for immersion lithographyROHM & HAAS ELECT MAT·Filed 2005·Granted Aug 24, 2010·8 cites·13 claims
- 0279US10209627B2Systems and methods for focus-sensitive metrology targetsKLA TENCOR CORP·Filed 2017·Granted Feb 19, 2019·2 cites·35 claims
- 0379US8911927B2Compositions and processes for immersion lithographyGALLAGHER MICHAEL K·Filed 2010·Granted Dec 16, 2014·3 cites·10 claims
- 0476US8428762B2Spin coating modelingGRAVES JOHN S·Filed 2010·Granted Apr 23, 2013·9 cites·10 claims
- 0546US2007157991A1Dispensing apparatus and methodROBERTSON STEWART·Filed 2005·Application pending·0 cites
- 0625US5688350AMethod of laminate manufactureTEKNEK ELECTRONICS LTD·Filed 1994·Granted Nov 18, 1997·5 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →