Inventor · disambiguated record
Steven M. Shank
Also filed as: SHANK STEVEN · SHANK STEVEN M
218 granted patents·13 pending applications·974 citations·filing 1995–2025
99Inventor score
Top patents by PatentIndex Score
231 records- 0199US9455187B1Backside device contactIBM·Filed 2015·Granted Sep 27, 2016·40 cites·18 claims
- 0298US11378743B1Optical components in the back-end-of-line stack of a photonics chip using plural cores vertically stackedGLOBALFOUNDRIES US INC·Filed 2021·Granted Jul 5, 2022·12 cites·20 claims
- 0398US11029465B1Micro-ring modulatorGLOBALFOUNDRIES US INC·Filed 2020·Granted Jun 8, 2021·21 cites·15 claims
- 0498US10509244B1Optical switches and routers operated by phase-changing materials controlled by heatersGLOBALFOUNDRIES INC·Filed 2018·Granted Dec 17, 2019·23 cites·20 claims
- 0598US10429582B1Waveguide-to-waveguide couplers with multiple tapersGLOBALFOUNDRIES INC·Filed 2018·Granted Oct 1, 2019·59 cites·19 claims
- 0698US10192779B1Bulk substrates with a self-aligned buried polycrystalline layerGLOBALFOUNDRIES INC·Filed 2018·Granted Jan 29, 2019·71 cites·12 claims
- 0798US9514987B1Backside contact to final substrateIBM·Filed 2015·Granted Dec 6, 2016·18 cites·7 claims
- 0897US11271077B2Trap-rich layer in a high-resistivity semiconductor layerGLOBALFOUNDRIES US INC·Filed 2020·Granted Mar 8, 2022·4 cites·20 claims
- 0997US10461152B2Radio frequency switches with air gap structuresGLOBALFOUNDRIES INC·Filed 2017·Granted Oct 29, 2019·15 cites·20 claims
- 1097US9274283B1Silicon photonics alignment tolerant vertical grating couplersIBM·Filed 2014·Granted Mar 1, 2016·51 cites·25 claims
- 1197US9059252B1Silicon waveguide on bulk silicon substrate and methods of formingIBM·Filed 2014·Granted Jun 16, 2015·37 cites·19 claims
- 1296US11803009B2Photonics structures having a locally-thickened dielectric layerGLOBALFOUNDRIES US INC·Filed 2022·Granted Oct 31, 2023·4 cites·20 claims
- 1396US11322387B1Bulk wafer switch isolationGLOBALFOUNDRIES US INC·Filed 2020·Granted May 3, 2022·4 cites·18 claims
- 1496US10643927B1Ring isolated through-substrate vias for high resistivity substratesGLOBALFOUNDRIES INC·Filed 2018·Granted May 5, 2020·26 cites·19 claims
- 1596US10156676B1Waveguides with multiple airgaps arranged in and over a silicon-on-insulator substrateGLOBALFOUNDRIES INC·Filed 2018·Granted Dec 18, 2018·18 cites·20 claims
- 1696US9922973B1Switches with deep trench depletion and isolation structuresGLOBALFOUNDRIES INC·Filed 2017·Granted Mar 20, 2018·17 cites·20 claims
- 1796US9368653B1Silicon photonics integration method and structureIBM·Filed 2014·Granted Jun 14, 2016·15 cites·25 claims
- 1895US11644620B2Switchable polarization rotatorsGLOBALFOUNDRIES US INC·Filed 2021·Granted May 9, 2023·3 cites·20 claims
- 1995US11637068B2Thermally and electrically conductive interconnectsGLOBALFOUNDRIES US INC·Filed 2020·Granted Apr 25, 2023·3 cites·14 claims
- 2095US11177404B2Fin-based photodetector structureGLOBALFOUNDRIES US INC·Filed 2020·Granted Nov 16, 2021·3 cites·20 claims
- 2195US10795083B1Heterogeneous directional couplers for photonics chipsGLOBALFOUNDRIES INC·Filed 2019·Granted Oct 6, 2020·13 cites·20 claims
- 2295US10090422B2Integrated photodetector waveguide structure with alignment toleranceIBM·Filed 2016·Granted Oct 2, 2018·8 cites·19 claims
- 2395US9716136B1Embedded polysilicon resistors with crystallization barriersGLOBALFOUNDRIES INC·Filed 2016·Granted Jul 25, 2017·12 cites·12 claims
- 2495US9466753B1Photodetector methods and photodetector structuresGLOBALFOUNDRIES INC·Filed 2015·Granted Oct 11, 2016·8 cites·14 claims
- 2595US8765536B2Stress engineered multi-layers for integration of CMOS and Si nanophotonicsIBM·Filed 2012·Granted Jul 1, 2014·14 cites·18 claims
- 2694US12028053B2Structure including resistor network for back biasing FET stackGLOBALFOUNDRIES US INC·Filed 2021·Granted Jul 2, 2024·2 cites·18 claims
- 2794US10795082B1Bragg gratings with airgap claddingGLOBALFOUNDRIES INC·Filed 2019·Granted Oct 6, 2020·12 cites·20 claims
- 2894US10393960B1Waveguides with multiple-level airgapsGLOBALFOUNDRIES INC·Filed 2018·Granted Aug 27, 2019·12 cites·20 claims
- 2994US8765502B2Germanium photodetector schottky contact for integration with CMOS and Si nanophotonicsASSEFA SOLOMON·Filed 2012·Granted Jul 1, 2014·9 cites·11 claims
- 3093US9874690B2Integrated waveguide structure with perforated chip edge sealIBM·Filed 2013·Granted Jan 23, 2018·15 cites·20 claims
- 3193US9755087B2Silicon photonics integration method and structureIBM·Filed 2016·Granted Sep 5, 2017·6 cites·20 claims
- 3292US11977258B1Structure with substrate-embedded arrow waveguide and methodGLOBALFOUNDRIES US INC·Filed 2022·Granted May 7, 2024·2 cites·20 claims
- 3392US11721719B2Heterojunction bipolar transistor with buried trap rich isolation regionGLOBALFOUNDRIES US INC·Filed 2020·Granted Aug 8, 2023·2 cites·8 claims
- 3492US10580893B2Sealed cavity structures with non-planar surface features to induce stressGLOBALFOUNDRIES INC·Filed 2018·Granted Mar 3, 2020·7 cites·19 claims
- 3592US9171971B2Encapsulated sensorsIBM·Filed 2013·Granted Oct 27, 2015·7 cites·19 claims
- 3691US11791334B2Heterojunction bipolar transistor with buried trap rich isolation regionGLOBALFOUNDRIES US INC·Filed 2020·Granted Oct 17, 2023·2 cites·12 claims
- 3791US10224396B1Deep trench isolation structuresGLOBALFOUNDRIES INC·Filed 2017·Granted Mar 5, 2019·11 cites·20 claims
- 3890US11880065B2Edge couplers integrated with dual ring resonatorsGLOBALFOUNDRIES US INC·Filed 2022·Granted Jan 23, 2024·2 cites·20 claims
- 3990US10720538B2Integrated photodetector waveguide structure with alignment toleranceIBM·Filed 2019·Granted Jul 21, 2020·2 cites·13 claims
- 4090US9231131B2Integrated photodetector waveguide structure with alignment toleranceIBM·Filed 2014·Granted Jan 5, 2016·6 cites·6 claims
- 4189US12342555B1Bipolar transistorGLOBALFOUNDRIES US INC·Filed 2024·Granted Jun 24, 2025·1 cites·17 claims
- 4289US11380759B2Transistor with embedded isolation layer in bulk substrateGLOBALFOUNDRIES US INC·Filed 2020·Granted Jul 5, 2022·2 cites·20 claims
- 4389US11221506B2Polarization switches including a phase change materialGLOBALFOUNDRIES US INC·Filed 2020·Granted Jan 11, 2022·2 cites·21 claims
- 4489US11004878B2Photodiodes integrated into a BiCMOS processGLOBALFOUNDRIES US INC·Filed 2019·Granted May 11, 2021·5 cites·19 claims
- 4589US10832940B2Bulk substrates with a self-aligned buried polycrystalline layerGLOBALFOUNDRIES INC·Filed 2018·Granted Nov 10, 2020·3 cites·13 claims
- 4689US10466514B1Electro-optic modulator with vertically-arranged optical pathsGLOBALFOUNDRIES INC·Filed 2018·Granted Nov 5, 2019·3 cites·20 claims
- 4789US10026852B2Silicon photonics integration method and structureIBM·Filed 2017·Granted Jul 17, 2018·3 cites·11 claims
- 4889US9887156B2Backside device contactIBM·Filed 2016·Granted Feb 6, 2018·4 cites·20 claims
- 4989US5569355AMethod for fabrication of microchannel electron multipliersCENTER FOR ADVANCED FIBEROPTIC·Filed 1995·Granted Oct 29, 1996·76 cites·26 claims
- 5088US11437522B2Field-effect transistors with a polycrystalline body in a shallow trench isolation regionGLOBALFOUNDRIES US INC·Filed 2020·Granted Sep 6, 2022·2 cites·14 claims
Showing the top 50 of 231 patent records by PatentIndex Score.
Join the waitlist — get patent alerts
Get an alert when Steven M. Shank files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →