Inventor · disambiguated record
Steve H. Y. Yang
Also filed as: YANG STEVE H Y
3 granted patents·35 citations·filing 1998–2000
71Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0168US6365015B1Method for depositing high density plasma chemical vapor deposition oxide in high aspect ratio gapsWAFERTECH INC·Filed 2000·Granted Apr 2, 2002·14 cites·1 claims
- 0246US6129819AMethod for depositing high density plasma chemical vapor deposition oxide in high aspect ratio gapsWAFERTECH LLC·Filed 1998·Granted Oct 10, 2000·14 cites·2 claims
- 0329US6251795B1Method for depositing high density plasma chemical vapor deposition oxide with improved topographyWAFERTECH L L C·Filed 1999·Granted Jun 26, 2001·7 cites·27 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →