Inventor · disambiguated record

Stephan Zschaeck

Also filed as: ZSCHAECK STEPHAN

1 granted patent·0 citations·filing 2022–2022

11Inventor score

Technology areasG03F

Files withZEISS CARL SMT GMBH1

Top patents by PatentIndex Score

1 record

0162US12135211B2Device for measuring a substrate and method for correcting cyclic error components of an interferometerZEISS CARL SMT GMBH·Filed 2022·Granted Nov 5, 2024·0 cites·13 claims

Join the waitlist — get patent alerts

Get an alert when Stephan Zschaeck files or is granted a new patent.

We store only your email — no account needed. See our privacy policy.

Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →