Inventor · disambiguated record
Suzan Leonie Auer-Jongepier
Also filed as: AUER-JONGEPIER SUZAN L · AUER-JONGEPIER SUZAN LEONIE
6 granted patents·53 citations·filing 2003–2007
78Inventor score
Top patents by PatentIndex Score
6 records- 0180US6879866B2Method, computer program product and apparatus for scheduling maintenance actions in a substrate processing systemASML NETHERLANDS BV·Filed 2003·Granted Apr 12, 2005·37 cites·31 claims
- 0269US7145643B2Interface unit, lithographic projection apparatus comprising such an interface unit and a device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Dec 5, 2006·11 cites·25 claims
- 0363US8634052B2Lithographic apparatus and method involving a ring to cover a gap between a substrate and a substrate tableAUER-JONGEPIER SUZAN LEONIE·Filed 2007·Granted Jan 21, 2014·3 cites·34 claims
- 0458US8636458B2Integrated post-exposure bake trackAUER-JONGEPIER SUZAN L·Filed 2007·Granted Jan 28, 2014·2 cites·21 claims
- 0548US7679714B2Lithographic apparatus, combination of lithographic apparatus and processing module, and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Mar 16, 2010·0 cites·12 claims
- 0644US7817241B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2007·Granted Oct 19, 2010·0 cites·22 claims
Join the waitlist — get patent alerts
Get an alert when Suzan Leonie Auer-Jongepier files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →