Inventor · disambiguated record
Su-Ting Cheng
Also filed as: CHENG SU-TING
2 granted patents·1 pending application·1 citations·filing 2019–2023
31Inventor score
Technology areasG03F
Files withASML NETHERLANDS BV3
Top patents by PatentIndex Score
3 records- 0175US11150563B2Method of measuring a parameter of a patterning process, metrology apparatus, targetASML NETHERLANDS BV·Filed 2019·Granted Oct 19, 2021·1 cites·21 claims
- 0255US10788757B2Metrology method and apparatus, computer program and lithographic systemASML NETHERLANDS BV·Filed 2019·Granted Sep 29, 2020·0 cites·20 claims
- 0354US2025147437A1Metrology method and associated metrology deviceASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →