Inventor · disambiguated record
Sungsil Cho
Also filed as: CHO SUNGSIL
5 granted patents·4 pending applications·0 citations·filing 2020–2025
60Inventor score
Files withENTEGRIS INC9
Top patents by PatentIndex Score
9 records- 0174US2024308856A1Silicon precursor materials, silicon-containing films, and related methodsENTEGRIS INC·Filed 2024·Application pending·0 cites
- 0269US12037681B2Method for forming carbon rich silicon-containing filmsENTEGRIS INC·Filed 2022·Granted Jul 16, 2024·0 cites·17 claims
- 0367US2023080718A1Silicon precursor materials, silicon-containing films, and related methodsENTEGRIS INC·Filed 2022·Application pending·0 cites
- 0465US2025296944A1Silicon precursorsENTEGRIS INC·Filed 2025·Application pending·0 cites
- 0561US12347672B2Silicon precursor compounds and method for forming silicon-containing filmsENTEGRIS INC·Filed 2022·Granted Jul 1, 2025·0 cites·11 claims
- 0661US12264392B2Silicon precursor compounds and method for forming silicon-containing filmsENTEGRIS INC·Filed 2021·Granted Apr 1, 2025·0 cites·11 claims
- 0761US11414750B2Method for forming carbon rich silicon-containing filmsENTEGRIS INC·Filed 2020·Granted Aug 16, 2022·0 cites·12 claims
- 0860US12071688B2Precursors and methods for preparing silicon-containing filmsENTEGRIS INC·Filed 2021·Granted Aug 27, 2024·0 cites·15 claims
- 0958US2023088079A1Silicon precursorsENTEGRIS INC·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →