Inventor · disambiguated record
Subhadra Gupta
Also filed as: GUPTA SUBHADRA
3 granted patents·1 pending application·128 citations·filing 1995–2005
74Inventor score
Top patents by PatentIndex Score
4 records- 0188US6537428B1Stable high rate reactive sputteringVEECO INSTR INC·Filed 1999·Granted Mar 25, 2003·95 cites·19 claims
- 0271US5958134AProcess equipment with simultaneous or sequential deposition and etching capabilitiesTOKYO ELECTRON LTD·Filed 1995·Granted Sep 28, 1999·28 cites·21 claims
- 0355US7101466B2Linear sweeping magnetron sputtering cathode and scanning in-line system for arc-free reactive deposition and high target utilizationKDF ELECTRONIC & VACUUM SERVIC·Filed 2003·Granted Sep 5, 2006·5 cites·25 claims
- 0450US2006157344A1Linear sweeping magnetron sputtering cathode and scanning in-line system for arc-free reactive deposition and high target utilizationGUPTA SUBHADRA·Filed 2005·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Subhadra Gupta files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →