Inventor · disambiguated record
Sung-Mu Hsu
Also filed as: HSU SUNG-MU
11 granted patents·244 citations·filing 1994–2003
91Inventor score
Top patents by PatentIndex Score
11 records- 0184US5510287AMethod of making vertical channel mask ROMTAIWAN SEMICONDUCTOR MANUF COM·Filed 1994·Granted Apr 23, 1996·58 cites·19 claims
- 0278US6274430B1Fabrication method for a high voltage electrical erasable programmable read only memory deviceUNITED MICROELECTRONICS CORP·Filed 2000·Granted Aug 14, 2001·33 cites·15 claims
- 0370US5781445APlasma damage monitorTAIWAN SEMICONDUCTOR MFG·Filed 1996·Granted Jul 14, 1998·40 cites·22 claims
- 0468US6197637B1Method for fabricating a non-volatile memory cellUNITED MICROELECTRONICS CORP·Filed 2000·Granted Mar 6, 2001·18 cites·14 claims
- 0566US5780161ANon-absorbing anti-reflective coated (ARC) reticle using thin dielectric films and method of forming the reticleTAIWAN SEMICONDUCTOR MFG·Filed 1996·Granted Jul 14, 1998·28 cites·16 claims
- 0659US5747856AVertical channel masked ROM memory cell with epitaxyTAIWAN SEMICONDUCTOR MFG·Filed 1997·Granted May 5, 1998·16 cites·26 claims
- 0753US6027815ANon-absorbing anti-reflective coated (ARC) reticle using thin dielectric films and method of forming reticleTAIWAN SEMICONDUCTOR MFG·Filed 1998·Granted Feb 22, 2000·17 cites·16 claims
- 0852US6180290B1Multi-phase mask using multi-layer thin filmsTAIWAN SEMICONDUCTOR MFG·Filed 1998·Granted Jan 30, 2001·14 cites·9 claims
- 0952US5688719AMethod for plasma hardening of patterned photoresist layersTAIWAN SEMICONDUCTOR MFG·Filed 1996·Granted Nov 18, 1997·17 cites·19 claims
- 1033US6858498B2Method for manufacturing memoryFiled 2003·Granted Feb 22, 2005·0 cites·15 claims
- 1132US5866481ASelective partial curing of spin-on-glass by ultraviolet radiation to protect integrated circuit dice near the wafer edgeTAIWAN SEMICONDUCTOR MFG·Filed 1996·Granted Feb 2, 1999·3 cites·15 claims
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