Inventor · disambiguated record
Sunggil Kang
Also filed as: KANG SUNGGIL
7 granted patents·10 pending applications·11 citations·filing 2011–2025
77Inventor score
Top patents by PatentIndex Score
17 records- 0188US11798788B2Hollow cathode, an apparatus including a hollow cathode for manufacturing a semiconductor device, and a method of manufacturing a semiconductor device using a hollow cathodeSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Oct 24, 2023·2 cites·20 claims
- 0285US10347468B2Plasma processing system, electron beam generator, and method of fabricating semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Jul 9, 2019·5 cites·20 claims
- 0375US10950414B2Plasma processing apparatus and method of manufacturing semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Mar 16, 2021·2 cites·14 claims
- 0470US10522332B2Plasma processing system, electron beam generator, and method of fabricating semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Dec 31, 2019·1 cites·7 claims
- 0569US11289308B2Apparatus and method for processing substrate and method of manufacturing semiconductor device using the methodSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Mar 29, 2022·1 cites·15 claims
- 0664US2024282586A1Wafer processing apparatus and wafer processing method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0761US2025253137A1Substrate processing apparatus including shower head and edge ring and related methods of manufacturing semiconductor devicesSAMSUNG ELECTRONICS CO LTD·Filed 2025·Application pending·0 cites
- 0857US12293901B2Substrate processing apparatus including shower head and edge ring and related methods of manufacturing semiconductor devicesSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted May 6, 2025·0 cites·16 claims
- 0956US2025226247A1Semiconductor processing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 1055US2025253165A1Dry cleaning apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 1153US11990348B2Wafer processing apparatus and wafer processing method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted May 21, 2024·0 cites·17 claims
- 1252US2024087856A1Substrate treating apparatus and substrate treating method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 1351US2025266249A1Plasma etching apparatus and plasma etching methodSAMSUNG ELECTRONICS CO LTD·Filed 2025·Application pending·0 cites
- 1449US2019122867A1Hollow cathode, an apparatus including a hollow cathode for manufacturing a semiconductor device, and a method of manufacturing a semiconductor device using a hollow cathodeSAMSUNG ELECTRONICS CO LTD·Filed 2018·Application pending·0 cites
- 1549US2024203701A1Substrate processing apparatus and substrate processing methodSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 1645US2013116682A1Non-Stick Conductive Coating for Biomedical ApplicationsKOO IL-GYO·Filed 2011·Application pending·0 cites
- 1742US2023071985A1Substrate processing apparatus and substrate processing method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →