Inventor · disambiguated record
Sunil Kapoor
Also filed as: KAPOOR SUNIL · KAPOOR SUNIL K
46 granted patents·20 pending applications·292 citations·filing 2004–2024
98Inventor score
Files withLAM RES CORP56BRADLEY KERRY3BOSTON SCIENT NEUROMODULATION2KAPOOR SUNIL2SUPERCONDUCTOR TECH2
Top patents by PatentIndex Score
66 records- 0198US11264207B2Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminalLAM RES CORP·Filed 2020·Granted Mar 1, 2022·8 cites·20 claims
- 0297US12205796B2Radio frequency power generator having multiple output portsLAM RES CORP·Filed 2020·Granted Jan 21, 2025·4 cites·19 claims
- 0397US11823928B2Control of wafer bow in multiple stationsLAM RES CORP·Filed 2021·Granted Nov 21, 2023·4 cites·20 claims
- 0497US10304663B1RF generator for generating a modulated frequency or an inter-modulated frequencyLAM RES CORP·Filed 2018·Granted May 28, 2019·23 cites·20 claims
- 0596US11994542B2RF signal parameter measurement in an integrated circuit fabrication chamberLAM RES CORP·Filed 2020·Granted May 28, 2024·6 cites·19 claims
- 0696US10622962B2Combiner and distributor for adjusting impedances or power across multiple plasma processing stationsLAM RES CORP·Filed 2019·Granted Apr 14, 2020·7 cites·18 claims
- 0796US10553465B2Control of water bow in multiple stationsLAM RES CORP·Filed 2017·Granted Feb 4, 2020·18 cites·16 claims
- 0896US9263350B2Multi-station plasma reactor with RF balancingLAM RES CORP·Filed 2014·Granted Feb 16, 2016·19 cites·12 claims
- 0995US8282983B1Closed loop control system for RF power balancing of the stations in a multi-station processing tool with shared RF sourceKAPOOR SUNIL·Filed 2008·Granted Oct 9, 2012·56 cites·12 claims
- 1094US10187032B2Combiner and distributor for adjusting impedances or power across multiple plasma processing stationsLAM RES CORP·Filed 2016·Granted Jan 22, 2019·8 cites·26 claims
- 1193US11183406B2Control of wafer bow in multiple stationsLAM RES CORP·Filed 2019·Granted Nov 23, 2021·7 cites·24 claims
- 1293US9954508B2Multiple-output radiofrequency matching module and associated methodsLAM RES CORP·Filed 2015·Granted Apr 24, 2018·6 cites·24 claims
- 1393US9840776B2Multi-station plasma reactor with RF balancingLAM RES CORP·Filed 2015·Granted Dec 12, 2017·7 cites·8 claims
- 1493US2025070741A1Combiner and distributor for adjusting impedances or power across multiple plasma processing stationsLAM RES CORP·Filed 2024·Application pending·0 cites
- 1592US8131357B2Apparatus and methods for detecting migration of neurostimulation leadsBRADLEY KERRY·Filed 2005·Granted Mar 6, 2012·60 cites·31 claims
- 1690US12401338B2Multiple-output radiofrequency matching module and associated methodsLAM RES CORP·Filed 2024·Granted Aug 26, 2025·0 cites·20 claims
- 1790US11258420B2Mutually induced filtersLAM RES CORP·Filed 2020·Granted Feb 22, 2022·2 cites·22 claims
- 1889US10991550B2Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station systemLAM RES CORP·Filed 2018·Granted Apr 27, 2021·7 cites·7 claims
- 1989US10145010B2Multi-station plasma reactor with RF balancingLAM RES CORP·Filed 2017·Granted Dec 4, 2018·4 cites·18 claims
- 2088US11881381B2Capacitance measurement without disconnecting from high power circuitLAM RES CORP·Filed 2019·Granted Jan 23, 2024·4 cites·20 claims
- 2188US2024348223A1Mutually induced filtersLAM RES CORP·Filed 2024·Application pending·0 cites
- 2287US10043636B2Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminalLAM RES CORP·Filed 2016·Granted Aug 7, 2018·3 cites·21 claims
- 2386US10637427B2Mutually induced filtersLAM RES CORP·Filed 2018·Granted Apr 28, 2020·3 cites·23 claims
- 2485US2023420218A1Apparatuses and methods for avoiding electrical breakdown from rf terminal to adjacent non-rf terminalLAM RES CORP·Filed 2023·Application pending·0 cites
- 2582US12143087B2Combiner and distributor for adjusting impedances or power across multiple plasma processing stationsLAM RES CORP·Filed 2022·Granted Nov 12, 2024·0 cites·20 claims
- 2682US10665427B2RF generator for generating a modulated frequency or an inter-modulated frequencyLAM RES CORP·Filed 2019·Granted May 26, 2020·2 cites·18 claims
- 2781US12051630B2RF current measurement in semiconductor processing toolLAM RES CORP·Filed 2019·Granted Jul 30, 2024·2 cites·19 claims
- 2881US2025079140A1Early warning systems and methods for determining capacitor failuresLAM RES CORP·Filed 2024·Application pending·0 cites
- 2980US8718757B2Apparatus and methods for detecting migration of neurostimulation leadsBRADLEY KERRY·Filed 2012·Granted May 6, 2014·9 cites·17 claims
- 3080US2024055285A1Control of wafer bow in multiple stationsLAM RES CORP·Filed 2023·Application pending·0 cites
- 3179US12394598B2Capacitance measurement without disconnecting from high power circuitLAM RES CORP·Filed 2023·Granted Aug 19, 2025·0 cites·22 claims
- 3279US12322582B2Anomalous plasma event detection and mitigation in semiconductor processingLAM RES CORP·Filed 2020·Granted Jun 3, 2025·1 cites·19 claims
- 3379US11784027B2Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminalLAM RES CORP·Filed 2022·Granted Oct 10, 2023·0 cites·20 claims
- 3478US12052006B2Mutually induced filtersLAM RES CORP·Filed 2022·Granted Jul 30, 2024·0 cites·20 claims
- 3578US8972023B2Apparatus and methods for detecting position and migration of neurostimulation leadsBOSTON SCIENT NEUROMODULATION·Filed 2013·Granted Mar 3, 2015·7 cites·33 claims
- 3678US2024355600A1Anomalous plasma event detection and mitigation in semiconductor processingLAM RES CORP·Filed 2024·Application pending·0 cites
- 3777US12040770B2Multiple-output radiofrequency matching module and associated methodsLAM RES CORP·Filed 2021·Granted Jul 16, 2024·0 cites·20 claims
- 3877US2025118533A1Radio frequency power generator having multiple output portsLAM RES CORP·Filed 2024·Application pending·0 cites
- 3975US2023246624A1Systems and methods for providing shunt cancellation of parasitic components in a plasma reactorLAM RES CORP·Filed 2023·Application pending·0 cites
- 4075US2024347400A1Rf current measurement in semiconductor processing toolLAM RES CORP·Filed 2024·Application pending·0 cites
- 4173US11038483B2Multiple-output radiofrequency matching module and associated methodsLAM RES CORP·Filed 2020·Granted Jun 15, 2021·0 cites·22 claims
- 4273US8401665B2Apparatus and methods for detecting position and migration of neurostimulation leadsBRADLEY KERRY·Filed 2005·Granted Mar 19, 2013·8 cites·27 claims
- 4373US2024272210A1Rf signal parameter measurement in an integrated circuit fabrication chamberLAM RES CORP·Filed 2024·Application pending·0 cites
- 4469US11258421B2Combiner and distributor for adjusting impedances or power across multiple plasma processing stationsLAM RES CORP·Filed 2020·Granted Feb 22, 2022·0 cites·22 claims
- 4567US10636624B2Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminalLAM RES CORP·Filed 2019·Granted Apr 28, 2020·0 cites·21 claims
- 4665US11594397B2Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station systemLAM RES CORP·Filed 2021·Granted Feb 28, 2023·0 cites·13 claims
- 4764US12176189B2Early warning systems and methods for determining capacitor failuresLAM RES CORP·Filed 2020·Granted Dec 24, 2024·0 cites·19 claims
- 4864US10373805B2Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminalLAM RES CORP·Filed 2018·Granted Aug 6, 2019·0 cites·21 claims
- 4962US7395091B2Systems and methods for receiver upgradeSUPERCONDUCTOR TECH·Filed 2004·Granted Jul 1, 2008·7 cites·21 claims
- 5060US10666218B2Multiple-output radiofrequency matching module and associated methodsLAM RES CORP·Filed 2018·Granted May 26, 2020·0 cites·20 claims
Showing the top 50 of 66 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →