Inventor · disambiguated record
Susumu Katoh
Also filed as: KATOH SUSUMU
3 granted patents·1 pending application·74 citations·filing 1990–2004
73Inventor score
Top patents by PatentIndex Score
4 records- 0179US5132545AIon implantation apparatusMITSUBISHI ELECTRIC CORP·Filed 1990·Granted Jul 21, 1992·41 cites·5 claims
- 0260US6207006B1Vacuum processing apparatusTOKYO ELECTRON LTD·Filed 1998·Granted Mar 27, 2001·29 cites·20 claims
- 0343US2006160359A1Vacuum processing apparatusTOKYO ELECTRON LTD·Filed 2004·Application pending·0 cites
- 0438USD414503SMachine for forming a semiconductor wafer filmTOKYO ELECTRON LTD·Filed 1998·Granted Sep 28, 1999·4 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →