Inventor · disambiguated record
Sushant S. Koshti
Also filed as: KOSHTI SUSHANT · KOSHTI SUSHANT S · KOSHTI SUSHANT SURESH
24 granted patents·16 pending applications·37 citations·filing 2006–2024
92Inventor score
Top patents by PatentIndex Score
40 records- 0198US11581203B2Systems for integrating load locks into a factory interface footprint spaceAPPLIED MATERIALS INC·Filed 2021·Granted Feb 14, 2023·7 cites·14 claims
- 0292US10192765B2Substrate processing systems, apparatus, and methods with factory interface environmental controlsAPPLIED MATERIALS INC·Filed 2014·Granted Jan 29, 2019·13 cites·23 claims
- 0385US11996307B2Semiconductor processing tool platform configuration with reduced footprintAPPLIED MATERIALS INC·Filed 2021·Granted May 28, 2024·1 cites·15 claims
- 0483US11169547B2Gas-pulsing-based shared precursor distribution system and methods of useAPPLIED MATERIALS INC·Filed 2019·Granted Nov 9, 2021·2 cites·18 claims
- 0577US9177842B2Degassing apparatus adapted to process substrates in multiple tiers with second actuatorENGLHARDT ERIC A·Filed 2012·Granted Nov 3, 2015·5 cites·5 claims
- 0675US2022392789A1Substrate processing systems, apparatus, and methods with factory interface environmental controlsAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 0774US7577487B2Methods and apparatus for a band to band transfer moduleAPPLIED MATERIALS INC·Filed 2006·Granted Aug 18, 2009·4 cites·21 claims
- 0873US11520358B2Gas-pulsing-based shared precursor distribution system and methods of useAPPLIED MATERIALS INC·Filed 2021·Granted Dec 6, 2022·0 cites·3 claims
- 0973US2024258137A1Semiconductor processing tool platform configuration with reduced footprintAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1071US12159796B2Systems and methods for integrating load locks into a factory interface footprint spaceAPPLIED MATERIALS INC·Filed 2023·Granted Dec 3, 2024·0 cites·22 claims
- 1171US2024375300A1Increased number of load ports on factory interface with robot that moves on trackAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1271US2024375221A1Removing elastomers from electronic device manufacturing equipment using laser technologyAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1370US8356968B2Methods and apparatus for an efficient handshake between material handling and material processing devices for safe material transferAPPLIED MATERIALS INC·Filed 2009·Granted Jan 22, 2013·3 cites·14 claims
- 1468US12076854B2Increased number of load ports on factory interface with robot that moves on trackAPPLIED MATERIALS INC·Filed 2022·Granted Sep 3, 2024·0 cites·20 claims
- 1566US10199256B2Methods and systems for improved mask processingAPPLIED MATERIALS INC·Filed 2014·Granted Feb 5, 2019·1 cites·9 claims
- 1665US2019391602A1Methods and apparatus for enhanced flow detection repeatability of thermal-based mass flow controllers (mfcs)APPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 1764US11282724B2Substrate processing systems, apparatus, and methods with factory interface environmental controlsAPPLIED MATERIALS INC·Filed 2019·Granted Mar 22, 2022·0 cites·13 claims
- 1864US2021143034A1Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methodsAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 1962US11772958B2Mass flow control based on micro-electromechanical devicesAPPLIED MATERIALS INC·Filed 2021·Granted Oct 3, 2023·0 cites·18 claims
- 2062US11087998B2Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methodsAPPLIED MATERIALS INC·Filed 2019·Granted Aug 10, 2021·0 cites·7 claims
- 2161US11450539B2Substrate processing systems, apparatus, and methods with factory interface environmental controlsAPPLIED MATERIALS INC·Filed 2018·Granted Sep 20, 2022·0 cites·13 claims
- 2260US10409295B2Methods and apparatus for enhanced flow detection repeatability of thermal-based mass flow controllers (MFCS)APPLIED MATERIALS INC·Filed 2016·Granted Sep 10, 2019·0 cites·17 claims
- 2358US10971381B2Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methodsAPPLIED MATERIALS INC·Filed 2014·Granted Apr 6, 2021·0 cites·14 claims
- 2457US12142508B2Factory interface robots usable with integrated load locksAPPLIED MATERIALS INC·Filed 2021·Granted Nov 12, 2024·0 cites·17 claims
- 2557US2025062143A1Substrate support device with diagnostic capabilitiesAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2656US7894923B2Methods and apparatus for sensing substrates in carriersKOSHTI SUSHANT S·Filed 2007·Granted Feb 22, 2011·1 cites·10 claims
- 2756US2024213056A1Reconfigurable mainframe with replaceable interface plate having replaceable chamber portsAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2856US2025316516A1Substrate loader and frame assemblyAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2955US8379082B2System, methods and apparatus for substrate carrier content verification using a material handling systemAPPLIED MATERIALS INC·Filed 2009·Granted Feb 19, 2013·0 cites·16 claims
- 3054US12159802B2Shortened load port for factory interfaceAPPLIED MATERIALS INC·Filed 2022·Granted Dec 3, 2024·0 cites·18 claims
- 3154US10847391B2Semiconductor device manufacturing platform with single and twinned processing chambersAPPLIED MATERIALS INC·Filed 2014·Granted Nov 24, 2020·0 cites·7 claims
- 3254US2025167027A1Closed loop control system to monitor inside parameters of a substrate carrierAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 3354US2019013216A1Semiconductor device manufacturing platform with single and twinned processing chambersAPPLIED MATERIALS INC·Filed 2018·Application pending·0 cites
- 3453US2025183063A1Cooling stationAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 3549US2017316967A1Apparatus and methods for a mask inverterAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 3647US2008294282A1Use of logical lots in semiconductor substrate processingAPPLIED MATERIALS INC·Filed 2008·Application pending·0 cites
- 3745US2021398824A1Batch wafer degas chamber and integration into factory interface and vacuum-based mainframeAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 3841USD1076836SMainframe with integrated lidAPPLIED MATERIALS INC·Filed 2022·Granted May 27, 2025·0 cites·1 claims
- 3940US8886354B2Methods, systems and apparatus for rapid exchange of work materialSHAH VINAY K·Filed 2010·Granted Nov 11, 2014·0 cites·22 claims
- 4039US2007258796A1Methods and apparatus for transporting substrate carriersENGLHARDT ERIC A·Filed 2007·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →