Inventor · disambiguated record
Sungyong Lim
Also filed as: LIM SUNGYONG
11 granted patents·13 pending applications·5 citations·filing 2018–2025
80Inventor score
Top patents by PatentIndex Score
24 records- 0188US11798788B2Hollow cathode, an apparatus including a hollow cathode for manufacturing a semiconductor device, and a method of manufacturing a semiconductor device using a hollow cathodeSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Oct 24, 2023·2 cites·20 claims
- 0287US12105132B2Electric field measuring apparatus and method of measuring electric field using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Oct 1, 2024·1 cites·20 claims
- 0375US10950414B2Plasma processing apparatus and method of manufacturing semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Mar 16, 2021·2 cites·14 claims
- 0470US2025004028A1Electric field measuring apparatus and method of measuring electric field using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0561US2025183004A1Plasma processing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0660US12424412B2Apparatus for providing RF power and operating method thereofSAMSUNG ELECTRONICS CO LTD·Filed 2023·Granted Sep 23, 2025·0 cites·13 claims
- 0760US11996275B2Device for radical diagnostic in plasma processing chamber, radical diagnostic system having the same, and operating method thereofSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted May 28, 2024·0 cites·18 claims
- 0860US11529967B2Driver assistance apparatus and method of thereofMANDO CORP·Filed 2021·Granted Dec 20, 2022·0 cites·4 claims
- 0959US2025174433A1Method of processing a substrateSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 1059US2025337619A1Frequency and power modulation radio frequency (rf) generatorSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 1158US2025218727A1Plasma generation circuit and substrate processing device including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 1257US2025259827A1Plasma processing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 1355US2025329513A1Inductively-coupled plasma antennas for semiconductor wafer processing systemsSAMSUNG ELECTRONICS CO LTD·Filed 2025·Application pending·0 cites
- 1455US2025357093A1Substrate processing device including variable impedance elementSAMSUNG ELECTRONICS CO LTD·Filed 2025·Application pending·0 cites
- 1554US2025246403A1Substrate processing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 1654US2024274661A1Dielectric structure and substrate processing apparatus including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 1753US12368022B2RF generating device and semiconductor manufacturing apparatus including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Jul 22, 2025·0 cites·17 claims
- 1850US11780427B2Apparatus for assisting driving and method thereofHL KLEMOVE CORP·Filed 2021·Granted Oct 10, 2023·0 cites·15 claims
- 1949US12125687B2System of semiconductor process and control method thereofSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Oct 22, 2024·0 cites·19 claims
- 2049US2019122867A1Hollow cathode, an apparatus including a hollow cathode for manufacturing a semiconductor device, and a method of manufacturing a semiconductor device using a hollow cathodeSAMSUNG ELECTRONICS CO LTD·Filed 2018·Application pending·0 cites
- 2148US2023207294A1Plasma control apparatus and plasma processing systemSAMSUNG ELECTRONICS CO LTD·Filed 2022·Application pending·0 cites
- 2248US2023187189A1Plasma control apparatus and plasma processing systemSAMSUNG ELECTRONICS CO LTD·Filed 2022·Application pending·0 cites
- 2346US12288674B2Hybrid matcher and radio frequency matching system including the hybrid matcherSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Apr 29, 2025·0 cites·20 claims
- 2444US12014905B2Apparatus and method fabricating semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Jun 18, 2024·0 cites·16 claims
Join the waitlist — get patent alerts
Get an alert when Sungyong Lim files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →