Inventor · disambiguated record

Susan S. Lopez

Also filed as: LOPEZ SUSAN S

1 granted patent·40 citations·filing 2003–2003

47Inventor score

Technology areasH10P

Files withKLA TENCOR TECH CORP1

Top patents by PatentIndex Score

1 record

0182US7968354B1Methods for correlating backside and frontside defects detected on a specimen and classification of backside defectsKLA TENCOR TECH CORP·Filed 2003·Granted Jun 28, 2011·40 cites·19 claims

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