Inventor · disambiguated record
Sung Hyun Oh
Also filed as: OH SUNG HYUN
7 granted patents·2 pending applications·49 citations·filing 2007–2012
77Inventor score
Top patents by PatentIndex Score
9 records- 0194US8802335B2Extreme ultra violet (EUV) maskSK HYNIX INC·Filed 2012·Granted Aug 12, 2014·43 cites·20 claims
- 0278US8021805B2Backside phase grating mask and method for manufacturing the sameHYNIX SEMICONDUCTOR INC·Filed 2009·Granted Sep 20, 2011·5 cites·14 claims
- 0353US8158305B2Photomask for extreme ultraviolet lithography and method for fabricating the sameOH SUNG HYUN·Filed 2009·Granted Apr 17, 2012·1 cites·17 claims
- 0448US7977016B2Method for fabricating extreme ultraviolet lithography maskHYNIX SEMICONDUCTOR INC·Filed 2008·Granted Jul 12, 2011·0 cites·8 claims
- 0544US7803505B2Method of fabricating a mask for a semiconductor deviceHYNIX SEMICONDUCTOR INC·Filed 2007·Granted Sep 28, 2010·0 cites·11 claims
- 0644US7764368B2Method and apparatus for inspecting defects on maskHYNIX SEMICONDUCTOR INC·Filed 2007·Granted Jul 27, 2010·0 cites·17 claims
- 0743US8163445B2Extreme ultraviolet mask and method for fabricating the sameOH SUNG HYUN·Filed 2008·Granted Apr 24, 2012·0 cites·10 claims
- 0835US2011250528A1Method for correcting image placement error in photomaskHYNIX SEMICONDUCTOR INC·Filed 2011·Application pending·0 cites
- 0932US2012135340A1Photomask and formation method thereofOH SUNG HYUN·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →