Inventor · disambiguated record
Susmit Singha Roy
Also filed as: ROY SUSMIT SINGHA
35 granted patents·10 pending applications·86 citations·filing 2016–2024
95Inventor score
Top patents by PatentIndex Score
45 records- 0198US10083834B2Methods of forming self-aligned viasAPPLIED MATERIALS INC·Filed 2017·Granted Sep 25, 2018·64 cites·15 claims
- 0285US10403542B2Methods of forming self-aligned vias and air gapsAPPLIED MATERIALS INC·Filed 2018·Granted Sep 3, 2019·4 cites·19 claims
- 0380US10622221B2Methods of etching metal oxides with less etch residueAPPLIED MATERIALS INC·Filed 2018·Granted Apr 14, 2020·2 cites·20 claims
- 0480US10510547B2Metal and metal-derived filmsAPPLIED MATERIALS INC·Filed 2018·Granted Dec 17, 2019·2 cites·20 claims
- 0579US11437274B2Fully self-aligned viaMICROMATERIALS LLC·Filed 2020·Granted Sep 6, 2022·1 cites·9 claims
- 0679US10930493B2Linerless continuous amorphous metal filmsAPPLIED MATERIALS INC·Filed 2019·Granted Feb 23, 2021·2 cites·19 claims
- 0779US10529568B2PECVD tungsten containing hardmask films and methods of makingAPPLIED MATERIALS INC·Filed 2017·Granted Jan 7, 2020·2 cites·12 claims
- 0878US11437273B2Self-aligned contact and contact over active gate structuresMircomaterials LLC·Filed 2020·Granted Sep 6, 2022·2 cites·8 claims
- 0977US10312137B2Hardmask layer for 3D NAND staircase structure in semiconductor applicationsAPPLIED MATERIALS INC·Filed 2016·Granted Jun 4, 2019·2 cites·14 claims
- 1076US10504727B2Thick tungsten hardmask films deposition on high compressive/tensile bow wafersAPPLIED MATERIALS INC·Filed 2017·Granted Dec 10, 2019·2 cites·20 claims
- 1173US10600684B2Ultra-thin diffusion barriersAPPLIED MATERIALS INC·Filed 2018·Granted Mar 24, 2020·1 cites·13 claims
- 1272US11289374B2Nucleation-free gap fill ALD processAPPLIED MATERIALS INC·Filed 2017·Granted Mar 29, 2022·1 cites·4 claims
- 1371US10840186B2Methods of forming self-aligned vias and air gapsAPPLIED MATERIALS INC·Filed 2019·Granted Nov 17, 2020·1 cites·11 claims
- 1467US11781218B2Defect free germanium oxide gap fillAPPLIED MATERIALS INC·Filed 2020·Granted Oct 10, 2023·0 cites·20 claims
- 1565US11232955B2Methods of etching metal oxides with less etch residueAPPLIED MATERIALS INC·Filed 2020·Granted Jan 25, 2022·0 cites·19 claims
- 1664US11069568B2Ultra-thin diffusion barriersAPPLIED MATERIALS INC·Filed 2020·Granted Jul 20, 2021·0 cites·18 claims
- 1763US2020373200A1Metal based hydrogen barrierAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 1862US12438050B2Electronic device fabrication using area-selective depositionAPPLIED MATERIALS INC·Filed 2023·Granted Oct 7, 2025·0 cites·20 claims
- 1962US11594415B2PECVD tungsten containing hardmask films and methods of makingAPPLIED MATERIALS INC·Filed 2019·Granted Feb 28, 2023·0 cites·9 claims
- 2062US11328928B2Conformal high concentration boron doping of semiconductorsAPPLIED MATERIALS INC·Filed 2019·Granted May 10, 2022·0 cites·16 claims
- 2162US10998195B2Metal and metal-derived filmsAPPLIED MATERIALS INC·Filed 2019·Granted May 4, 2021·0 cites·20 claims
- 2261US12110584B2Low temperature growth of transition metal chalcogenidesAPPLIED MATERIALS INC·Filed 2021·Granted Oct 8, 2024·0 cites·18 claims
- 2361US11094544B2Methods of forming self-aligned viasAPPLIED MATERIALS INC·Filed 2019·Granted Aug 17, 2021·0 cites·4 claims
- 2461US10741435B2Oxidative volumetric expansion of metals and metal containing compoundsAPPLIED MATERIALS INC·Filed 2019·Granted Aug 11, 2020·0 cites·18 claims
- 2561US2024026527A1Method of depositing silicon based dielectric filmAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2659US10410865B2Methods of forming self-aligned viasAPPLIED MATERIALS INC·Filed 2018·Granted Sep 10, 2019·0 cites·17 claims
- 2756US10950498B2Selective and self-limiting tungsten etch processAPPLIED MATERIALS INC·Filed 2019·Granted Mar 16, 2021·0 cites·18 claims
- 2856US10319624B2Oxidative volumetric expansion of metals and metal containing compoundsAPPLIED MATERIALS INC·Filed 2017·Granted Jun 11, 2019·0 cites·18 claims
- 2956US2024290612A1Conformal and selective sin depositionAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 3055US11171047B2Fluorine-doped nitride films for improved high-k reliabilityAPPLIED MATERIALS INC·Filed 2020·Granted Nov 9, 2021·0 cites·18 claims
- 3154US12018364B2Super-conformal germanium oxide filmsAPPLIED MATERIALS INC·Filed 2020·Granted Jun 25, 2024·0 cites·15 claims
- 3254US11177174B2Selective deposition of carbon films and uses thereofAPPLIED MATERIALS INC·Filed 2019·Granted Nov 16, 2021·0 cites·20 claims
- 3354US2024145235A1Sin gap fill via nucleation inhibitionAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 3452US12046468B2Conformal silicon-germanium film depositionAPPLIED MATERIALS INC·Filed 2020·Granted Jul 23, 2024·0 cites·17 claims
- 3551US2024027912A1Method to reduce line edge roughness for euv photoresist patternAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 3651US2024332028A1Compressive films for large area gapfillAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 3750US11414751B2Self-aligned structures from sub-oxidesAPPLIED MATERIALS INC·Filed 2018·Granted Aug 16, 2022·0 cites·20 claims
- 3850US10403502B2Boron doped tungsten carbide for hardmask applicationsAPPLIED MATERIALS INC·Filed 2018·Granted Sep 3, 2019·0 cites·20 claims
- 3949US11462438B2Volumetric expansion of metal-containing films by silicidationAPPLIED MATERIALS INC·Filed 2018·Granted Oct 4, 2022·0 cites·19 claims
- 4047US11177164B2Self-aligned high aspect ratio structures and methods of makingAPPLIED MATERIALS INC·Filed 2018·Granted Nov 16, 2021·0 cites·8 claims
- 4147US2021404056A1Ultra-thin films with transition metal dichalcogenidesAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 4247US2022108888A1Selective Deposition of GermaniumAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 4347US2021327891A1Stack for 3d-nand memory cellAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 4446US11315943B2Bottom-up approach to high aspect ratio hole formation in 3D memory structuresAPPLIED MATERIALS INC·Filed 2018·Granted Apr 26, 2022·0 cites·20 claims
- 4542US2019355621A1Method For Increasing The Verticality Of PillarsMICROMATERIALS LLC·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →