Inventor · disambiguated record
Susan Telford
Also filed as: TELFORD SUSAN · TELFORD SUSAN WEIHER
5 granted patents·270 citations·filing 1993–1998
84Inventor score
Files withAPPLIED MATERIALS INC5
Top patents by PatentIndex Score
5 records- 0192US5326725AClamping ring and susceptor thereforAPPLIED MATERIALS INC·Filed 1993·Granted Jul 5, 1994·166 cites·13 claims
- 0279US5565382AProcess for forming tungsten silicide on semiconductor wafer using dichlorosilane gasAPPLIED MATERIALS INC·Filed 1993·Granted Oct 15, 1996·33 cites·28 claims
- 0369US5482749APretreatment process for treating aluminum-bearing surfaces of deposition chamber prior to deposition of tungsten silicide coating on substrate thereinAPPLIED MATERIALS INC·Filed 1994·Granted Jan 9, 1996·28 cites·25 claims
- 0456US6090706APreconditioning process for treating deposition chamber prior to deposition of tungsten silicide coating on active substrates thereinAPPLIED MATERIALS INC·Filed 1998·Granted Jul 18, 2000·21 cites·20 claims
- 0556US5510297AProcess for uniform deposition of tungsten silicide on semiconductor wafers by treatment of susceptor having aluminum nitride surface thereon with tungsten silicide after cleaning of susceptorAPPLIED MATERIALS INC·Filed 1995·Granted Apr 23, 1996·22 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →