Inventor · disambiguated record
Susumu Yamauchi
Also filed as: YAMAUCHI SUSUMU
4 granted patents·5 pending applications·1 citations·filing 2007–2024
56Inventor score
Top patents by PatentIndex Score
9 records- 0169US10199268B2Film forming method and film forming systemTOKYO ELECTRON LTD·Filed 2017·Granted Feb 5, 2019·1 cites·15 claims
- 0252US2024297209A1Film forming method, method of manufacturing semiconductor device, and processing systemTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0348US11282714B2Etching method and etching deviceCENTRAL GLASS CO LTD·Filed 2017·Granted Mar 22, 2022·0 cites·15 claims
- 0444US10998199B2Etching method and etching apparatusTOKYO ELECTRON LTD·Filed 2019·Granted May 4, 2021·0 cites·9 claims
- 0544US2023154744A1Method and apparatus for forming silicon carbide-containing filmTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 0644US2023146757A1Method and apparatus for forming silicon carbide-containing filmTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 0739US2020263295A1Film forming method, method for cleaning processing chamber for film formation, and film forming apparatusTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 0836US10788447B2Liquid analyzer and liquid analysis systemTOKYO METROPOLITAN GOVERNMENT·Filed 2015·Granted Sep 29, 2020·0 cites·8 claims
- 0933US2010037959A1Method for supplying process gas, system for supplying process gas, and system for processing object to be processedKAMAISHI TAKAYUKI·Filed 2007·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →