Inventor · disambiguated record
Susie Xiuru Yang
Also filed as: YANG SUSIE X · YANG SUSIE XIURU
4 granted patents·2 pending applications·6 citations·filing 2004–2008
63Inventor score
Top patents by PatentIndex Score
6 records- 0174US7196350B2Method and apparatus for characterizing features formed on a substrateAPPLIED MATERIALS INC·Filed 2005·Granted Mar 27, 2007·4 cites·39 claims
- 0259US8293460B2Double exposure patterning with carbonaceous hardmaskCHEN HUI W·Filed 2008·Granted Oct 23, 2012·2 cites·8 claims
- 0351US7459319B2Method and apparatus for characterizing features formed on a substrateAPPLIED MATERIALS INC·Filed 2007·Granted Dec 2, 2008·0 cites·21 claims
- 0443US7817289B2Methods and apparatus for measuring thickness of etching residues on a substrateAPPLIED MATERIALS INC·Filed 2008·Granted Oct 19, 2010·0 cites·13 claims
- 0540US2008192253A1Method and test-structure for determining an offset between lithographic masksYANG SUSIE XIURU·Filed 2007·Application pending·0 cites
- 0636US2005014299A1Control of metal resistance in semiconductor products via integrated metrologyAPPLIED MATERIALS INC·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →