Inventor · disambiguated record
Swaminathan Sivakumar
Also filed as: SIVAKUMAR SWAMINATHAN · SIVAKUMAR SWAMINATHAN SAM
14 granted patents·3 pending applications·49 citations·filing 2005–2024
90Inventor score
Top patents by PatentIndex Score
17 records- 0196US10892223B2Advanced lithography and self-assembled devicesINTEL CORP·Filed 2016·Granted Jan 12, 2021·11 cites·25 claims
- 0295US12218052B2Advanced lithography and self-assembled devicesINTEL CORP·Filed 2023·Granted Feb 4, 2025·1 cites·20 claims
- 0393US10409152B2Pattern decomposition lithography techniquesINTEL CORP·Filed 2017·Granted Sep 10, 2019·4 cites·20 claims
- 0491US11854787B2Advanced lithography and self-assembled devicesINTEL CORP·Filed 2022·Granted Dec 26, 2023·1 cites·19 claims
- 0588US9558947B2Pattern decomposition lithography techniquesWALLACE CHARLES H·Filed 2011·Granted Jan 31, 2017·6 cites·16 claims
- 0688US2025125260A1Advanced lithography and self-assembled devicesINTEL CORP·Filed 2024·Application pending·0 cites
- 0787US10490519B2Pattern decomposition lithography techniquesINTEL CORP·Filed 2017·Granted Nov 26, 2019·2 cites·20 claims
- 0885US11373950B2Advanced lithography and self-assembled devicesINTEL CORP·Filed 2020·Granted Jun 28, 2022·1 cites·19 claims
- 0984US7915171B2Double patterning techniques and structuresINTEL CORP·Filed 2008·Granted Mar 29, 2011·10 cites·20 claims
- 1081US7572557B2Non-collinear end-to-end structures with sub-resolution assist featuresINTEL CORP·Filed 2005·Granted Aug 11, 2009·6 cites·15 claims
- 1179US7521157B2Cross-shaped sub-resolution assist featureINTEL CORP·Filed 2006·Granted Apr 21, 2009·5 cites·19 claims
- 1272US7759028B2Sub-resolution assist featuresINTEL CORP·Filed 2009·Granted Jul 20, 2010·2 cites·22 claims
- 1352US8233210B2Illumination aperture for optical lithographyWALLACE CHARLES·Filed 2008·Granted Jul 31, 2012·0 cites·6 claims
- 1451US9046761B2Lithography mask having sub-resolution phased assist featuresINTEL CORP·Filed 2013·Granted Jun 2, 2015·0 cites·25 claims
- 1543US9142421B2Double patterning lithography techniquesWALLACE CHARLES H·Filed 2011·Granted Sep 22, 2015·0 cites·25 claims
- 1639US2009263751A1Methods for double patterning photoresistSIVAKUMAR SWAMINATHAN·Filed 2008·Application pending·0 cites
- 1737US2007231748A1Patterning trenches in a photoresist layer with tight end-to-end separationSIVAKUMAR SWAMINATHAN·Filed 2006·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Swaminathan Sivakumar files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →