Inventor · disambiguated record
Syed S. Basha
Also filed as: BASHA SYED · BASHA SYED S
4 granted patents·431 citations·filing 1999–2002
83Inventor score
Top patents by PatentIndex Score
4 records- 0193US6228563B1Method and apparatus for removing post-etch residues and other adherent matricesGASONICS INTERNAT CORP·Filed 1999·Granted May 8, 2001·218 cites·20 claims
- 0292US6333268B1Method and apparatus for removing post-etch residues and other adherent matricesNOVELLUS SYSTEMS INC·Filed 2000·Granted Dec 25, 2001·117 cites·10 claims
- 0388US6778762B1Sloped chamber top for substrate processingNOVELLUS SYSTEMS INC·Filed 2002·Granted Aug 17, 2004·67 cites·22 claims
- 0457US6190103B1Wafer transfer device and methodGASONICS INTERNAT CORP·Filed 1999·Granted Feb 20, 2001·29 cites·59 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →