Inventor · disambiguated record
Szilard Istvan Csiszar
Also filed as: CSISZAR SZILARD ISTVAN
2 granted patents·20 citations·filing 2010–2012
59Inventor score
Top patents by PatentIndex Score
2 records- 0189US8629973B2Lithographic apparatus and method for illumination uniformity correction and uniformity drift compensationZIMMERMAN RICHARD CARL·Filed 2010·Granted Jan 14, 2014·13 cites·20 claims
- 0276US8663881B2Radiation source, method of controlling a radiation source, lithographic apparatus, and method for manufacturing a deviceBUURMAN ERIK PETRUS·Filed 2012·Granted Mar 4, 2014·7 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →