Inventor · disambiguated record
Takeshi Akimoto
Also filed as: AKIMOTO TAKESHI
20 granted patents·2 pending applications·683 citations·filing 1993–2022
96Inventor score
Top patents by PatentIndex Score
22 records- 0192US5798544ASemiconductor memory device having trench isolation regions and bit lines formed thereoverNEC CORP·Filed 1994·Granted Aug 25, 1998·105 cites·8 claims
- 0290US5911852APlasma processing apparatusSUMITOMO METAL IND·Filed 1996·Granted Jun 15, 1999·94 cites·17 claims
- 0389US5677824AElectrostatic chuck with mechanism for lifting up the peripheral of a substrateNEC CORP·Filed 1996·Granted Oct 14, 1997·126 cites·3 claims
- 0486US5647912APlasma processing apparatusNEC CORP·Filed 1996·Granted Jul 15, 1997·76 cites·12 claims
- 0582US6670010B2Composite sheet, method of preparing same, and thermosensitive recording adhesive label sheet having sameRICOH KK·Filed 2002·Granted Dec 30, 2003·18 cites·10 claims
- 0679US7824153B2Stator vane of turbo molecular pumpBOC EDWARDS JAPAN LTD·Filed 2005·Granted Nov 2, 2010·11 cites·20 claims
- 0779US5639309APlasma processing apparatus adjusted for a batch-processing of a plurality of wafers with plasma gasesNEC CORP·Filed 1996·Granted Jun 17, 1997·34 cites·55 claims
- 0877US5415719ATwo parallel plate electrode type dry etching apparatusNEC CORP·Filed 1993·Granted May 16, 1995·30 cites·9 claims
- 0975US6060427AThermosensitive recording materialRICOH KK·Filed 1998·Granted May 9, 2000·24 cites·13 claims
- 1074US5545258AMicrowave plasma processing systemSUMITOMO METAL IND·Filed 1995·Granted Aug 13, 1996·49 cites·8 claims
- 1172US5721190AThermosensitive recording mediumRICOH KK·Filed 1996·Granted Feb 24, 1998·22 cites·5 claims
- 1269US6846538B2Composite sheet, method of preparing same, and adhesive label sheet assembly having sameRICOH KK·Filed 2002·Granted Jan 25, 2005·12 cites·10 claims
- 1361US12362208B2Inspection method and etching systemTOKYO ELECTRON LTD·Filed 2022·Granted Jul 15, 2025·0 cites·17 claims
- 1461US5804923APlasma processing apparatus having a protected microwave transmission windowSUMITOMO METAL IND·Filed 1996·Granted Sep 8, 1998·17 cites·7 claims
- 1560US6189481B1Microwave plasma processing apparatusNEC CORP·Filed 1994·Granted Feb 20, 2001·14 cites·3 claims
- 1659US5529632AMicrowave plasma processing systemSUMITOMO METAL IND·Filed 1995·Granted Jun 25, 1996·26 cites·6 claims
- 1750US2023253224A1Substrate processing system, substrate processing method, and map creating deviceTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 1850US2023118026A1Data processing apparatus, data processing system, data processing method, and data processing programTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 1949US11587763B2Substrate processing system, switching timing creation support device,switching timing creation support method, and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Feb 21, 2023·0 cites·20 claims
- 2044US7390164B2Fixing structure for fixing rotor to rotor shaft, and turbo molecular pump having the fixing structureEDWARDS JAPAN LTD·Filed 2004·Granted Jun 24, 2008·9 cites·5 claims
- 2143US5614025APlasma processing apparatusNEC CORP·Filed 1994·Granted Mar 25, 1997·6 cites·1 claims
- 2240US5668053AMethod for fabricating multilayer semiconductor deviceNEC CORP·Filed 1994·Granted Sep 16, 1997·10 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →