Inventor · disambiguated record
Takehiko Arita
Also filed as: ARITA TAKEHIKO
7 granted patents·4 pending applications·2 citations·filing 2018–2023
71Inventor score
Files withTOKYO ELECTRON LTD11
Top patents by PatentIndex Score
11 records- 0180US11817334B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2021·Granted Nov 14, 2023·1 cites·11 claims
- 0269US12500101B2Temperature control system and system of processing substrateTOKYO ELECTRON LTD·Filed 2023·Granted Dec 16, 2025·0 cites·18 claims
- 0369US2024053073A1Temperature control medium processing apparatus and temperature control medium processing methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0468US11404251B2Processing apparatus for processing target objectTOKYO ELECTRON LTD·Filed 2018·Granted Aug 2, 2022·1 cites·6 claims
- 0559US11835278B2Temperature control medium processing apparatus and temperature control medium processing methodTOKYO ELECTRON LTD·Filed 2021·Granted Dec 5, 2023·0 cites·15 claims
- 0651US11692639B2Valve deviceTOKYO ELECTRON LTD·Filed 2021·Granted Jul 4, 2023·0 cites·4 claims
- 0743US11237577B2Temperature control system including multiple valves and temperature control methodTOKYO ELECTRON LTD·Filed 2019·Granted Feb 1, 2022·0 cites·16 claims
- 0842US2020243353A1Control method of heat medium and heat medium control apparatusTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 0940US2019310034A1Flow rate control method, temperature control method, and processing apparatusTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 1038US10907864B2Cooling systemTOKYO ELECTRON LTD·Filed 2019·Granted Feb 2, 2021·0 cites·5 claims
- 1137US2018218887A1Processing apparatus for processing target objectTOKYO ELECTRON LTD·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →