Inventor · disambiguated record
Takanori Banse
Also filed as: BANSE Takanori
11 granted patents·4 pending applications·6 citations·filing 2016–2023
81Inventor score
Files withTOKYO ELECTRON LTD15
Top patents by PatentIndex Score
15 records- 0179US11145490B2Plasma processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Oct 12, 2021·2 cites·11 claims
- 0271US11404249B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Aug 2, 2022·2 cites·25 claims
- 0369US10825662B2Method for driving member and processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Nov 3, 2020·1 cites·16 claims
- 0465US11721522B2Plasma processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Aug 8, 2023·0 cites·15 claims
- 0564US9818582B2Plasma processing methodTOKYO ELECTRON LTD·Filed 2016·Granted Nov 14, 2017·1 cites·7 claims
- 0661US12300467B2Plasma processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted May 13, 2025·0 cites·18 claims
- 0760US2021313148A1Plasma etching method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 0855US11367590B2Plasma processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Jun 21, 2022·0 cites·17 claims
- 0954US2024071728A1Substrate processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 1054US2021020416A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 1153US10546723B2Plasma processing methodTOKYO ELECTRON LTD·Filed 2018·Granted Jan 28, 2020·0 cites·7 claims
- 1252US2019326092A1Plasma etching method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 1339US10770268B2Plasma processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Sep 8, 2020·0 cites·10 claims
- 1439US10707088B2Method of processing target objectTOKYO ELECTRON LTD·Filed 2017·Granted Jul 7, 2020·0 cites·18 claims
- 1539US10692726B2Method for processing workpieceTOKYO ELECTRON LTD·Filed 2017·Granted Jun 23, 2020·0 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →