Inventor · disambiguated record
Takamasa Chikuma
Also filed as: CHIKUMA TAKAMASA
3 granted patents·6 citations·filing 2002–2013
58Inventor score
Top patents by PatentIndex Score
3 records- 0171US9318363B2Substrate processing system and substrate position correction methodTOKYO ELECTRON LTD·Filed 2013·Granted Apr 19, 2016·4 cites·6 claims
- 0249US9223305B2Semiconductor manufacturing systemIKEDA GAKU·Filed 2012·Granted Dec 29, 2015·1 cites·8 claims
- 0344US6999830B2Method and device for processing semiconductor waferTOKYO ELECTRON LTD·Filed 2002·Granted Feb 14, 2006·1 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →