Inventor · disambiguated record
Takehiro Fukada
Also filed as: FUKADA TAKEHIRO
2 granted patents·5 pending applications·0 citations·filing 2018–2024
22Inventor score
Files withTOKYO ELECTRON LTD7
Top patents by PatentIndex Score
7 records- 0164US2025223701A1Substrate-processing apparatus and substrate-processing methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0256US2025051920A1Substrate-processing apparatus and substrate-processing methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0349US11495457B2Film forming methodTOKYO ELECTRON LTD·Filed 2020·Granted Nov 8, 2022·0 cites·13 claims
- 0446US2022372624A1Control apparatus and control method for film forming apparatusTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0543US11328901B2Deposition methodTOKYO ELECTRON LTD·Filed 2020·Granted May 10, 2022·0 cites·9 claims
- 0638US2019284691A1Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 0732US2018277338A1Plasma generation method, plasma processing method using the same and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →