Inventor · disambiguated record
Takahide Fukuda
Also filed as: FUKUDA TAKAHIDE
7 granted patents·854 citations·filing 1994–1997
91Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD7
Top patents by PatentIndex Score
7 records- 0196US5518542ADouble-sided substrate cleaning apparatusTOKYO ELECTRON LTD·Filed 1994·Granted May 21, 1996·265 cites·23 claims
- 0295US5565034AApparatus for processing substrates having a film formed on a surface of the substrateTOKYO ELECTRON LTD·Filed 1994·Granted Oct 15, 1996·216 cites·38 claims
- 0393US5964954ADouble-sided substrate cleaning apparatus and cleaning method using the sameTOKYO ELECTRON LTD·Filed 1997·Granted Oct 12, 1999·119 cites·4 claims
- 0491US6054181AMethod of substrate processing to form a film on multiple target objectsTOKYO ELECTRON LTD·Filed 1996·Granted Apr 25, 2000·106 cites·18 claims
- 0589US5725664ASemiconductor wafer processing apparatus including localized humidification between coating and heat treatment sectionsTOKYO ELECTRON LTD·Filed 1996·Granted Mar 10, 1998·87 cites·23 claims
- 0671US5686143AResist treating methodTOKYO ELECTRON LTD·Filed 1996·Granted Nov 11, 1997·31 cites·6 claims
- 0761US5733375AApparatus for supplying a treatment materialTOKYO ELECTRON LTD·Filed 1995·Granted Mar 31, 1998·30 cites·23 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →