Inventor · disambiguated record
Takayuki Fukudome
Also filed as: FUKUDOME TAKAYUKI
3 granted patents·1 citations·filing 2016–2019
48Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
3 records- 0162US10886151B2Heating apparatus and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Jan 5, 2021·1 cites·4 claims
- 0253US11476136B2Substrate processing apparatus and method of adjusting substrate processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Oct 18, 2022·0 cites·3 claims
- 0346US10504757B2Substrate processing apparatus and method of adjusting substrate processing apparatusTOKYO ELECTRON LTD·Filed 2016·Granted Dec 10, 2019·0 cites·4 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →