Inventor · disambiguated record
Takashi Gemma
Also filed as: GEMMA TAKASHI
15 granted patents·2 pending applications·544 citations·filing 1986–2019
95Inventor score
Top patents by PatentIndex Score
17 records- 0197US6456382B2Interferometer that measures aspherical surfacesNIKON CORP·Filed 2001·Granted Sep 24, 2002·69 cites·6 claims
- 0293US7843550B2Projection optical system inspecting method and inspection apparatus, and a projection optical system manufacturing methodNIKON CORP·Filed 2006·Granted Nov 30, 2010·17 cites·16 claims
- 0391US5898501AApparatus and methods for measuring wavefront aberrations of a microlithography projection lensNIKON CORP·Filed 1997·Granted Apr 27, 1999·94 cites·23 claims
- 0487US6344898B1Interferometric apparatus and methods for measuring surface topography of a test surfaceNIKON CORP·Filed 1999·Granted Feb 5, 2002·79 cites·4 claims
- 0587US5563706AInterferometric surface profiler with an alignment optical memberNIKON CORP·Filed 1994·Granted Oct 8, 1996·65 cites·8 claims
- 0684US5561525AInterferometer for observing the interference pattern of a surface under test utilizing an adjustable aperture stopNIKON CORP·Filed 1995·Granted Oct 1, 1996·69 cites·28 claims
- 0777US10288489B2Method and device for measuring wavefront using light-exit section causing light amount distribution in at least one directionNIKON CORP·Filed 2013·Granted May 14, 2019·4 cites·22 claims
- 0877US5039223AInterferometer for measuring aspherical form with the utilization of computer generated hologramTOPCON CORP·Filed 1989·Granted Aug 13, 1991·33 cites·6 claims
- 0976US4758089AHolographic interferometerTOKYO OPTICAL·Filed 1986·Granted Jul 19, 1988·27 cites·6 claims
- 1075US4812042AHolographic interferometerYOKOKURA TAKASHI·Filed 1987·Granted Mar 14, 1989·29 cites·10 claims
- 1172US7868997B2Projection optical system inspecting method and inspection apparatus, and a projection optical system manufacturing methodNIKON CORP·Filed 2006·Granted Jan 11, 2011·5 cites·16 claims
- 1268US5504596AExposure method and apparatus using holographic techniquesNIKON CORP·Filed 1993·Granted Apr 2, 1996·29 cites·3 claims
- 1352US10571340B2Method and device for measuring wavefront using diffraction grating, and exposure method and deviceNIKON CORP·Filed 2019·Granted Feb 25, 2020·0 cites·18 claims
- 1451US6008904AApparatus and methods for detecting and correcting distortion of interference fringesNIKON CORP·Filed 1997·Granted Dec 28, 1999·13 cites·8 claims
- 1545US4848907AMethod of and apparatus for analyzing interference fringesTOKYO OPTICAL·Filed 1987·Granted Jul 18, 1989·11 cites·4 claims
- 1636US2004036890A1Methods and devices for measuring a surface profile of an optical elementNIKON CORP·Filed 2001·Application pending·0 cites
- 1734US2002012124A1Apparatus and methods for measuring surface profiles and wavefront aberrations, and lens systems comprising sameNIKON CORP·Filed 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →