Inventor · disambiguated record
Takuya Itahashi
Also filed as: ITAHASHI TAKUYA
2 granted patents·1 pending application·5 citations·filing 2020–2024
45Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
3 records- 0188US11691172B2Liquid processing apparatus and liquid processing methodTOKYO ELECTRON LTD·Filed 2020·Granted Jul 4, 2023·5 cites·11 claims
- 0261US12070769B2Liquid processing apparatus and liquid processing methodTOKYO ELECTRON LTD·Filed 2023·Granted Aug 27, 2024·0 cites·10 claims
- 0355US2024242978A1Substrate processing apparatus and substrate processing apparatus maintenance methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →