Inventor · disambiguated record
Takeshi Itatani
Also filed as: ITATANI TAKESHI
6 granted patents·1 pending application·0 citations·filing 2017–2022
63Inventor score
Files withTOKYO ELECTRON LTD7
Top patents by PatentIndex Score
7 records- 0154US11150142B2Thermocouple-fixing jigTOKYO ELECTRON LTD·Filed 2019·Granted Oct 19, 2021·0 cites·6 claims
- 0253US2023096191A1Substrate processing method and substrate processing systemTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0350US10847379B2Etching method and etching apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Nov 24, 2020·0 cites·9 claims
- 0445US10731248B2Vacuum processing apparatus and operation method thereofTOKYO ELECTRON LTD·Filed 2017·Granted Aug 4, 2020·0 cites·5 claims
- 0540US10519542B2Purging methodTOKYO ELECTRON LTD·Filed 2017·Granted Dec 31, 2019·0 cites·18 claims
- 0640US10460988B2Removal method and processing methodTOKYO ELECTRON LTD·Filed 2017·Granted Oct 29, 2019·0 cites·15 claims
- 0739US11718910B2Pre-coating method and film forming methodTOKYO ELECTRON LTD·Filed 2019·Granted Aug 8, 2023·0 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →