Inventor · disambiguated record
Tal Itzkovich
Also filed as: ITZKOVICH TAL
8 granted patents·1 pending application·71 citations·filing 2013–2024
85Inventor score
Top patents by PatentIndex Score
9 records- 0198US10527951B2Compound imaging metrology targetsKLA TENCOR CORP·Filed 2016·Granted Jan 7, 2020·18 cites·21 claims
- 0292US9093458B2Device correlated metrology (DCM) for OVL with embedded SEM structure overlay targetsAMIR NURIEL·Filed 2013·Granted Jul 28, 2015·31 cites·20 claims
- 0389US9903711B2Feed forward of metrology data in a metrology systemKLA TENCOR CORP·Filed 2016·Granted Feb 27, 2018·5 cites·33 claims
- 0488US10203200B2Analyzing root causes of process variation in scatterometry metrologyKLA TENCOR CORP·Filed 2016·Granted Feb 12, 2019·7 cites·23 claims
- 0587US9476838B2Hybrid imaging and scatterometry targetsKLA TENCOR CORP·Filed 2014·Granted Oct 25, 2016·5 cites·18 claims
- 0681US10579768B2Process compatibility improvement by fill factor modulationKLA TENCOR CORP·Filed 2016·Granted Mar 3, 2020·3 cites·5 claims
- 0776US10303835B2Method and apparatus for direct self assembly in target design and productionKLA TENCOR CORP·Filed 2015·Granted May 28, 2019·2 cites·26 claims
- 0855US12487273B2Optimal determination of an overlay targetAPPLIED MATERIALS ISRAEL LTD·Filed 2023·Granted Dec 2, 2025·0 cites·19 claims
- 0947US2024289940A1Optimal determination of an overlay target using machine learningAPPLIED MATERIALS ISRAEL LTD·Filed 2024·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →