Inventor · disambiguated record
Takayuki Kajikawa
Also filed as: KAJIKAWA Takayuki
4 granted patents·2 pending applications·7 citations·filing 2014–2024
60Inventor score
Top patents by PatentIndex Score
6 records- 0183US9862914B2Cleaning agent for semiconductor substrates and method for processing semiconductor substrate surfaceWAKO PURE CHEM IND LTD·Filed 2014·Granted Jan 9, 2018·7 cites·17 claims
- 0266US2024286245A1Substrate treatment apparatus and method for treating substrateEBARA CORP·Filed 2024·Application pending·0 cites
- 0351US2025312830A1Substrate cleaning device, substrate processing device, substrate cleaning method, and substrate processing methodEBARA CORP·Filed 2023·Application pending·0 cites
- 0448US12312569B2Kit for cleaning agent and method for preparing cleaning agentFUJIFILM CORP·Filed 2021·Granted May 27, 2025·0 cites·13 claims
- 0548US11848216B2Cleaning apparatus for cleaning member, substrate cleaning apparatus and cleaning member assemblyEBARA CORP·Filed 2021·Granted Dec 19, 2023·0 cites·13 claims
- 0645US12343770B2Cleaning device and cleaning methodEBARA CORP·Filed 2021·Granted Jul 1, 2025·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →