Inventor · disambiguated record
Tatsuo Kawashima
Also filed as: KAWASHIMA TATSUO
4 granted patents·26 citations·filing 2002–2021
64Inventor score
Technology areasG01R
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
4 records- 0180US6762616B2Probe systemTOKYO ELECTRON LTD·Filed 2002·Granted Jul 13, 2004·26 cites·6 claims
- 0252US11467099B2Inspection apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Oct 11, 2022·0 cites·4 claims
- 0352US11385260B2Probe card holding device and inspection deviceTOKYO ELECTRON LTD·Filed 2021·Granted Jul 12, 2022·0 cites·7 claims
- 0437US10962565B2Substrate inspection apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Mar 30, 2021·0 cites·2 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →