Inventor · disambiguated record

Takahiro Kawawa

Also filed as: KAWAWA TAKAHIRO

3 granted patents·1 pending application·4 citations·filing 2020–2025

52Inventor score

Technology areasH10P

Files withTOKYO ELECTRON LTD4

Top patents by PatentIndex Score

4 records

0187US12020968B2Method for adjusting contact position of lift pins, method for detecting contact position of lift pins, and substrate placement mechanismTOKYO ELECTRON LTD·Filed 2021·Granted Jun 25, 2024·4 cites·15 claims
0243US2025253174A1Substrate Processing Apparatus and Temperature Monitoring MethodTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
0341US11862439B2Substrate processing apparatus and charge neutralization method for mounting tableTOKYO ELECTRON LTD·Filed 2020·Granted Jan 2, 2024·0 cites·7 claims
0440US12002662B2Electrostatic attraction device and neutralization methodTOKYO ELECTRON LTD·Filed 2020·Granted Jun 4, 2024·0 cites·8 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →