Inventor · disambiguated record
Takashi Kayamoto
Also filed as: KAYAMOTO TAKASHI
8 granted patents·1 pending application·92 citations·filing 1998–2011
85Inventor score
Top patents by PatentIndex Score
9 records- 0182US9070487B2Conductive memberKAYAMOTO TAKASHI·Filed 2011·Granted Jun 30, 2015·3 cites·3 claims
- 0280US7220319B2Electrostatic chucking stage and substrate processing apparatusCANON ANELVA CORP·Filed 2003·Granted May 22, 2007·25 cites·18 claims
- 0375US6687113B2Electrostatic chuckNHK SPRING CO LTD·Filed 2001·Granted Feb 3, 2004·19 cites·2 claims
- 0466USRE42175EElectrostatic chucking stage and substrate processing apparatusCANON ANELVA CORP·Filed 2009·Granted Mar 1, 2011·2 cites·26 claims
- 0561US6535371B1Layered ceramic/metallic assembly, and an electrostatic chuck using such an assemblyFiled 1999·Granted Mar 18, 2003·32 cites·15 claims
- 0653US9556524B2Temperature regulator, cooling device, and method for manufacturing temperature regulatorKAYAMOTO TAKASHI·Filed 2011·Granted Jan 31, 2017·1 cites·5 claims
- 0751US6074604ABrazing material for stainless steelNHK SPRING CO LTD·Filed 1998·Granted Jun 13, 2000·10 cites·15 claims
- 0839US9524888B2Stage heater and method of manufacturing shaftKAYAMOTO TAKASHI·Filed 2011·Granted Dec 20, 2016·0 cites·4 claims
- 0932US2013072075A1Conductive member and method of manufacturing the sameKAYAMOTO TAKASHI·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →