Inventor · disambiguated record
Takeki Kogawa
Also filed as: KOGAWA TAKEKI
3 granted patents·0 citations·filing 2007–2017
39Inventor score
Top patents by PatentIndex Score
3 records- 0140US10573540B2Substrate processing apparatus and substrate processing methodSHIBAURA MECHATRONICS CORP·Filed 2017·Granted Feb 25, 2020·0 cites·7 claims
- 0240US8094923B2Wafer containing cassette inspection device and methodHAYASHI YOSHINORI·Filed 2007·Granted Jan 10, 2012·0 cites·13 claims
- 0337US8107064B2Disc wafer inspecting device and inspecting methodHAYASHI YOSHINORI·Filed 2007·Granted Jan 31, 2012·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →