Inventor · disambiguated record
Takamitsu Komaki
Also filed as: KOMAKI TAKAMITSU
12 granted patents·4 pending applications·9 citations·filing 2016–2025
83Inventor score
Top patents by PatentIndex Score
16 records- 0192US11372342B2Position measurement apparatus, overlay inspection apparatus, position measurement method, imprint apparatus, and article manufacturing methodCANON KK·Filed 2021·Granted Jun 28, 2022·3 cites·18 claims
- 0290US11422461B2Imprint apparatus and method of manufacturing articleCANON KK·Filed 2020·Granted Aug 23, 2022·2 cites·10 claims
- 0379US11537056B2Measurement apparatus, lithography apparatus, and method of manufacturing articleCANON KK·Filed 2020·Granted Dec 27, 2022·1 cites·19 claims
- 0475US2025341444A1Deterioration estimation method, laser device, and electronic device manufacturing methodGIGAPHOTON INC·Filed 2025·Application pending·0 cites
- 0573US11880132B2Imprint apparatus and method of manufacturing articleCANON KK·Filed 2022·Granted Jan 23, 2024·0 cites·7 claims
- 0663US10732523B2Detection device, imprint apparatus, method of manufacturing article, illumination optical system, and detection methodCANON KK·Filed 2016·Granted Aug 4, 2020·1 cites·20 claims
- 0763US10732522B2Imprint apparatus and article manufacturing methodCANON KK·Filed 2016·Granted Aug 4, 2020·1 cites·27 claims
- 0863US2025233382A1Laser device and electronic device manufacturing methodGIGAPHOTON INC·Filed 2025·Application pending·0 cites
- 0962US11181363B2Measurement device, imprint apparatus, method for manufacturing product, light amount determination method, and light amount adjustment methodCANON KK·Filed 2017·Granted Nov 23, 2021·1 cites·10 claims
- 1061US2025354944A1Edge position determination method, edge position determination apparatus, and edge analysis methodGIGAPHOTON INC·Filed 2025·Application pending·0 cites
- 1159US2024001486A1Spectrum waveform control method, laser apparatus, exposure apparatus, and electronic device manufacturing methodGIGAPHOTON INC·Filed 2023·Application pending·0 cites
- 1258US12098913B2Detector that detects relative positions of marks while blocking non-interference lightCANON KK·Filed 2021·Granted Sep 24, 2024·0 cites·15 claims
- 1353US10545416B2Detection apparatus, lithography apparatus, and method of manufacturing articleCANON KK·Filed 2019·Granted Jan 28, 2020·0 cites·22 claims
- 1452US11673313B2Imprint apparatus and article manufacturing methodCANON KK·Filed 2020·Granted Jun 13, 2023·0 cites·9 claims
- 1545US10777440B2Detection device, imprint apparatus, planarization device, detection method, and article manufacturing methodCANON KK·Filed 2019·Granted Sep 15, 2020·0 cites·19 claims
- 1644US11188001B2Alignment apparatus, alignment method, lithography apparatus, and method of manufacturing articleCANON KK·Filed 2019·Granted Nov 30, 2021·0 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →