Inventor · disambiguated record
Takehiko Komatsu
Also filed as: KOMATSU TAKEHIKO
5 granted patents·615 citations·filing 2000–2002
86Inventor score
Files withAPPLIED MATERIALS INC5
Top patents by PatentIndex Score
5 records- 0197US6403491B1Etch method using a dielectric etch chamber with expanded process windowAPPLIED MATERIALS INC·Filed 2000·Granted Jun 11, 2002·396 cites·24 claims
- 0293US6451703B1Magnetically enhanced plasma etch process using a heavy fluorocarbon etching gasAPPLIED MATERIALS INC·Filed 2000·Granted Sep 17, 2002·96 cites·47 claims
- 0390US6362109B1Oxide/nitride etching having high selectivity to photoresistAPPLIED MATERIALS INC·Filed 2000·Granted Mar 26, 2002·73 cites·23 claims
- 0484US6613689B2Magnetically enhanced plasma oxide etch using hexafluorobutadieneAPPLIED MATERIALS INC·Filed 2002·Granted Sep 2, 2003·38 cites·52 claims
- 0565US6897154B2Selective etching of low-k dielectricsAPPLIED MATERIALS INC·Filed 2002·Granted May 24, 2005·12 cites·32 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →