Inventor · disambiguated record
Takeo Kubota
Also filed as: KUBOTA TAKEO
13 granted patents·4 pending applications·134 citations·filing 1999–2019
91Inventor score
Top patents by PatentIndex Score
17 records- 0193US7014529B1Substrate processing method and substrate processing apparatusTOSHIBA KK·Filed 2005·Granted Mar 21, 2006·26 cites·20 claims
- 0291US8641480B2Polishing apparatus and polishing methodNAKANISHI MASAYUKI·Filed 2011·Granted Feb 4, 2014·10 cites·12 claims
- 0391US7744445B2Polishing apparatus and polishing methodTOSHIBA KK·Filed 2005·Granted Jun 29, 2010·26 cites·13 claims
- 0486US7638439B2Peripheral processing method and method of manufacturing a semiconductor deviceTOSHIBA KK·Filed 2006·Granted Dec 29, 2009·12 cites·17 claims
- 0584US8748289B2Method for manufacturing semiconductor deviceEBARA CORP·Filed 2013·Granted Jun 10, 2014·5 cites·4 claims
- 0684US6429134B1Method of manufacturing semiconductor deviceTOSHIBA KK·Filed 2000·Granted Aug 6, 2002·33 cites·16 claims
- 0782US8445360B2Method for manufacturing semiconductor deviceNAKANISHI MASAYUKI·Filed 2011·Granted May 21, 2013·5 cites·6 claims
- 0867US6743645B2Method of inspecting process for manufacturing semiconductor device and method of manufacturing semiconductor deviceTOSHIBA KK·Filed 2002·Granted Jun 1, 2004·11 cites·18 claims
- 0951US7888139B2Fabricating method of nonvolatile semiconductor storage apparatusTOSHIBA KK·Filed 2009·Granted Feb 15, 2011·0 cites·14 claims
- 1051US6984532B2Method of judging residual film by optical measurementTOSHIBA KK·Filed 2003·Granted Jan 10, 2006·3 cites·18 claims
- 1147US10777424B2Method for manufacturing semiconductor deviceTOSHIBA KK·Filed 2019·Granted Sep 15, 2020·0 cites·12 claims
- 1246US2009191706A1Method for fabricating a semiconductor deviceKUBOTA TAKEO·Filed 2008·Application pending·0 cites
- 1345US2008113590A1Polishing method for semiconductor wafer and polishing apparatus for semiconductor waferKUBOTA TAKEO·Filed 2007·Application pending·0 cites
- 1443US7172492B2Polishing method and polishing systemTOSHIBA KK·Filed 2005·Granted Feb 6, 2007·0 cites·20 claims
- 1542US2011256811A1Polishing methodNAKANISHI MASAYUKI·Filed 2011·Application pending·0 cites
- 1641US2007000873A1Substrate processing method and semiconductor device manufacturing methodKUBOTA TAKEO·Filed 2006·Application pending·0 cites
- 1733US7354861B1Polishing method and polishing liquidTOSHIBA KK·Filed 1999·Granted Apr 8, 2008·3 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →